TY - JOUR
T1 - Spectroscopy for identification of plasma sources for lithography and water window imaging
AU - O'Sullivan, Gerry
AU - Dunne, Padraig
AU - Higashiguchi, Takeshi
AU - Li, Bowen
AU - Liu, Luning
AU - Lokasani, Ragava
AU - Long, Elaine
AU - Ohashi, Hayato
AU - O'Reilly, Fergal
AU - Sheridan, Paul
AU - Sokell, Emma
AU - Suzuki, Chihiro
AU - Wu, Tao
N1 - Publisher Copyright:
© 2015 IOP Publishing Ltd.
PY - 2015/9/7
Y1 - 2015/9/7
N2 - The identification of sources for applications that include nanolithography, surface patterning and high resolution imaging is the focus of a considerable activity in the extreme ultraviolet (EUV) or soft x-ray (SXR) spectral regions. We report on the result of a study of the spectra from laser produced plasmas of a number of medium and high Z metals undertaken in order to identify potential sources for use with available multilayer mirrors. The main focus was the study of unresolved transition arrays emitted from ions with 3d, 4d and 4f valence subshells that emit strongly in the water window (2.34-4.38 nm).and that could be used for biological imaging or cell tomography.
AB - The identification of sources for applications that include nanolithography, surface patterning and high resolution imaging is the focus of a considerable activity in the extreme ultraviolet (EUV) or soft x-ray (SXR) spectral regions. We report on the result of a study of the spectra from laser produced plasmas of a number of medium and high Z metals undertaken in order to identify potential sources for use with available multilayer mirrors. The main focus was the study of unresolved transition arrays emitted from ions with 3d, 4d and 4f valence subshells that emit strongly in the water window (2.34-4.38 nm).and that could be used for biological imaging or cell tomography.
UR - http://www.scopus.com/inward/record.url?scp=84950978748&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/635/1/012026
DO - 10.1088/1742-6596/635/1/012026
M3 - 会議記事
AN - SCOPUS:84950978748
SN - 1742-6588
VL - 635
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012026
T2 - 29th International Conference on Photonic, Electronic and Atomic Collisions, ICPEAC 2015
Y2 - 22 July 2015 through 28 July 2015
ER -