TY - JOUR
T1 - Spectroscopy for identification of plasma sources for lithography and water window imaging
AU - O'Sullivan, Gerry
AU - Dunne, Padraig
AU - Higashiguchi, Takeshi
AU - Li, Bowen
AU - Lokasani, Ragava
AU - Long, Elaine
AU - Ohashi, Hayato
AU - O'Reilly, Fergal
AU - Sheridan, Paul
AU - Sheil, John
AU - Sokell, Emma
AU - Suzuki, Chihiro
AU - Wu, Tao
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2015/9/7
Y1 - 2015/9/7
N2 - We report on the result of an extensive study of the extreme ultraviolet (EUV) and soft x-ray spectra from laser produced plasmas of a number of medium and high Z metals undertaken to identify potential sources for use with multilayer mirrors as sources for lithography and water window imaging and cell tomography.
AB - We report on the result of an extensive study of the extreme ultraviolet (EUV) and soft x-ray spectra from laser produced plasmas of a number of medium and high Z metals undertaken to identify potential sources for use with multilayer mirrors as sources for lithography and water window imaging and cell tomography.
UR - http://www.scopus.com/inward/record.url?scp=84949257457&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/635/9/092037
DO - 10.1088/1742-6596/635/9/092037
M3 - 会議記事
AN - SCOPUS:84949257457
SN - 1742-6588
VL - 635
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 9
M1 - 092037
T2 - 29th International Conference on Photonic, Electronic and Atomic Collisions, ICPEAC 2015
Y2 - 22 July 2015 through 28 July 2015
ER -