Role of nitrogen in the formation of CN x films by pulsed laser deposition

Zhiping Wang*, Hiroaki Ito, Katsumi Masugata

*この論文の責任著者

研究成果: ジャーナルへの寄稿学術論文査読

5 被引用数 (Scopus)

抄録

Carbon nitride (CN x) films, deposited by pulsed laser deposition (PLD) in nitrogen (N 2) atmosphere, were studied with respect to mechanical, morphological, compositional, structural, and optical properties. All the samples were prepared at room temperature and under various N 2 pressures, ranging from vacuum up to 50 Pa. Nitrogen concentration (C N) rapidly increases with increasing N 2 pressure and reaches to a saturated value above 10 Pa. The Raman results reveal that the D/G ratio increases with the increase in N 2 pressure, contributing the graphitization of carbon films. With further addition of nitrogen into carbon films, optical transmission is enhanced. Localization of the π electrons due to the heteropolar bonding and the high porosity of the CN x samples are speculated to be the reason of enhancement in optical transmission.

本文言語英語
論文番号A9
ページ(範囲)1815-1819
ページ数5
ジャーナルIEEE Transactions on Plasma Science
40
7 PART 1
DOI
出版ステータス出版済み - 2012

ASJC Scopus 主題領域

  • 核物理学および高エネルギー物理学
  • 凝縮系物理学

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