Emission of water-window soft x-rays under optically thin conditions using low-density foam targets

Hiroyuki Hara, Hiromu Kawasaki, Toshiki Tamura, Tadashi Hatano, Takeo Ejima, Weihua Jiang, Hayato Ohashi, Shinichi Namba, Atsushi Sunahara, Akira Sasaki, Masaharu Nishikino, Gerry O’Sullivan, Takeshi Higashiguchi*

*この論文の責任著者

研究成果: ジャーナルへの寄稿学術論文査読

10 被引用数 (Scopus)

抄録

The effect of optical thickness in a bismuth water-window soft x-ray source is considered by comparing the emission from laser-produced plasmas of a 7.5% atomic density foam target and a solid-density target. The number of photons recorded in the 4 nm region was comparable for both targets at a plasma-initiating laser pulse duration of 6 ns. From experiments at different pulse durations of 150 ps and 6 ns, self-absorption (opacity) effects were found to be relatively small for bismuth plasmas as compared to those of tin, based on the same emission mechanism and which are used in 13.5 nm sources for extreme ultraviolet lithography.

本文言語英語
ページ(範囲)3750-3753
ページ数4
ジャーナルOptics Letters
43
15
DOI
出版ステータス出版済み - 2018/08/01

ASJC Scopus 主題領域

  • 原子分子物理学および光学

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