Aoyagi, S., Yamada, M., Yamamoto, S., Takahashi, T., Suzuki, M., Hosomi, R., Fukunaga, K.,
Uta, D. &
Takazawa, T.,
2018/04/24,
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc.,
p. 326-329 4 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2018-January).
研究成果: 書籍の章/レポート/会議録 › 会議への寄与 › 査読