Aoyagi, S., Yamada, M., Yamamoto, S., Takahashi, T., Suzuki, M., Hosomi, R., Fukunaga, K., Uta, D. & Takazawa, T., 2018/04/24, 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018.Institute of Electrical and Electronics Engineers Inc., p. 326-3294 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2018-January).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review