Transparent-oxide-semiconductor based staggered self-alignment thin-film transistors

Staggered type self-aligned transparent-oxide-semiconductor transistors with indium-zinc-oxide as a semiconductor have studied. In this device fabrication, successive sputtering of oxide semiconductor and insulator without breaking of vacuum and without exposing in air, humidity and oxygen can be realized because oxide semiconductor is transparent. As a result of fabrication, transistor characteristics with mobility of 30cm²/Vs and on-off ratio of 10⁵ could be obtained for the newly developed self-alignment device structure.