@inproceedings{71c7bd20d9de4552bef1b305724597ca,
title = "Structure and mechanical properties of Cr(Al)N/Al2O3 nanocomposite hard coatings fabricated by differential pumping cosputtering",
abstract = "Cr(Al)N/Al2O3 hard coatings were fabricated by differential pumping cosputtering. Analytical electron microscopy revealed that the films sputter-deposited alternately by the CrAl and Al2O3 targets in the flow of Ar/N2 and Ar, repsectively, grew in a columnar structure normal to the substrate. In a Cr(Al)N/17 vol.% Al2O3 film prepared at a substrate rotational speed of ω = 12 rpm, each column comprised NaCl-type Cr(Al)N crystallites including homogeneously dispersive fine amorphous alumina particles (a-Al2O3). The indentation hardness (HIT) and Young's modulus (E∗) increased with increasing ω. With increasing Al2O3 fraction, they increased once and then decreased. The maxima HIT and E∗ were obtained at 17 vol.% AI2O3, and they were HIT = ∼43 GPa and E∗ = ∼350 Gpa for the coating prepared at ω = 12 rpm. The a-Al2O3 particles worked as obstacles against the deformation of the Cr(Al)N lattices.",
keywords = "Analytical electron microscopy, Cr(Al)N/AlO, Differential pumping cosputtering, Hard coating, Hardness",
author = "Masahiro Kawasak and Masateru Nose and Ichiro Onishi and Kenji Matsuda and Makoto Shiojiri",
year = "2015",
language = "英語",
series = "NSTI: Advanced Materials - TechConnect Briefs 2015",
publisher = "Taylor and Francis Inc.",
pages = "436--439",
editor = "Bart Romanowicz and Matthew Laudon",
booktitle = "NSTI",
note = "10th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 18th Annual Nanotech Conference and Expo, and the 2015 National SBIR/STTR Conference ; Conference date: 14-06-2015 Through 17-06-2015",
}