Structure and mechanical properties of Cr(Al)N/Al2O3 nanocomposite hard coatings fabricated by differential pumping cosputtering

Masahiro Kawasak; Masateru Nose; Ichiro Onishi; Kenji Matsuda; Makoto Shiojiri

Structure and mechanical properties of Cr(Al)N/Al₂O₃ nanocomposite hard coatings fabricated by differential pumping cosputtering

Masahiro Kawasak, Masateru Nose, Ichiro Onishi, Kenji Matsuda, Makoto Shiojiri

Materials Design and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Cr(Al)N/Al₂O₃ hard coatings were fabricated by differential pumping cosputtering. Analytical electron microscopy revealed that the films sputter-deposited alternately by the CrAl and Al₂O₃ targets in the flow of Ar/N₂ and Ar, repsectively, grew in a columnar structure normal to the substrate. In a Cr(Al)N/17 vol.% Al₂O₃ film prepared at a substrate rotational speed of ω = 12 rpm, each column comprised NaCl-type Cr(Al)N crystallites including homogeneously dispersive fine amorphous alumina particles (a-Al₂O₃). The indentation hardness (H_IT) and Young's modulus (E∗) increased with increasing ω. With increasing Al₂O₃ fraction, they increased once and then decreased. The maxima H_IT and E∗ were obtained at 17 vol.% AI₂O₃, and they were H_IT = ∼43 GPa and E∗ = ∼350 Gpa for the coating prepared at ω = 12 rpm. The a-Al₂O₃ particles worked as obstacles against the deformation of the Cr(Al)N lattices.

Original language	English
Title of host publication	NSTI
Subtitle of host publication	Advanced Materials - TechConnect Briefs 2015
Editors	Bart Romanowicz, Matthew Laudon
Publisher	Taylor and Francis Inc.
Pages	436-439
Number of pages	4
ISBN (Electronic)	9781498747271
State	Published - 2015
Event	10th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 18th Annual Nanotech Conference and Expo, and the 2015 National SBIR/STTR Conference - Washington, United States Duration: 2015/06/14 → 2015/06/17

Publication series

Name	NSTI: Advanced Materials - TechConnect Briefs 2015
Volume	1

Conference

Conference	10th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 18th Annual Nanotech Conference and Expo, and the 2015 National SBIR/STTR Conference
Country/Territory	United States
City	Washington
Period	2015/06/14 → 2015/06/17

Keywords

Analytical electron microscopy
Cr(Al)N/AlO
Differential pumping cosputtering
Hard coating
Hardness

ASJC Scopus subject areas

Surfaces, Coatings and Films
Fluid Flow and Transfer Processes
Biotechnology
Fuel Technology

Cite this

Kawasak, M., Nose, M., Onishi, I., Matsuda, K., & Shiojiri, M. (2015). Structure and mechanical properties of Cr(Al)N/Al₂O₃ nanocomposite hard coatings fabricated by differential pumping cosputtering. In B. Romanowicz, & M. Laudon (Eds.), NSTI: Advanced Materials - TechConnect Briefs 2015 (pp. 436-439). (NSTI: Advanced Materials - TechConnect Briefs 2015; Vol. 1). Taylor and Francis Inc..

Kawasak, Masahiro ; Nose, Masateru ; Onishi, Ichiro et al. / Structure and mechanical properties of Cr(Al)N/Al₂O₃ nanocomposite hard coatings fabricated by differential pumping cosputtering. NSTI: Advanced Materials - TechConnect Briefs 2015. editor / Bart Romanowicz ; Matthew Laudon. Taylor and Francis Inc., 2015. pp. 436-439 (NSTI: Advanced Materials - TechConnect Briefs 2015).

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title = "Structure and mechanical properties of Cr(Al)N/Al2O3 nanocomposite hard coatings fabricated by differential pumping cosputtering",

abstract = "Cr(Al)N/Al2O3 hard coatings were fabricated by differential pumping cosputtering. Analytical electron microscopy revealed that the films sputter-deposited alternately by the CrAl and Al2O3 targets in the flow of Ar/N2 and Ar, repsectively, grew in a columnar structure normal to the substrate. In a Cr(Al)N/17 vol.% Al2O3 film prepared at a substrate rotational speed of ω = 12 rpm, each column comprised NaCl-type Cr(Al)N crystallites including homogeneously dispersive fine amorphous alumina particles (a-Al2O3). The indentation hardness (HIT) and Young's modulus (E∗) increased with increasing ω. With increasing Al2O3 fraction, they increased once and then decreased. The maxima HIT and E∗ were obtained at 17 vol.% AI2O3, and they were HIT = ∼43 GPa and E∗ = ∼350 Gpa for the coating prepared at ω = 12 rpm. The a-Al2O3 particles worked as obstacles against the deformation of the Cr(Al)N lattices.",

keywords = "Analytical electron microscopy, Cr(Al)N/AlO, Differential pumping cosputtering, Hard coating, Hardness",

author = "Masahiro Kawasak and Masateru Nose and Ichiro Onishi and Kenji Matsuda and Makoto Shiojiri",

year = "2015",

language = "英語",

series = "NSTI: Advanced Materials - TechConnect Briefs 2015",

publisher = "Taylor and Francis Inc.",

pages = "436--439",

editor = "Bart Romanowicz and Matthew Laudon",

booktitle = "NSTI",

note = "10th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 18th Annual Nanotech Conference and Expo, and the 2015 National SBIR/STTR Conference ; Conference date: 14-06-2015 Through 17-06-2015",

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Kawasak, M, Nose, M, Onishi, I, Matsuda, K & Shiojiri, M 2015, Structure and mechanical properties of Cr(Al)N/Al₂O₃ nanocomposite hard coatings fabricated by differential pumping cosputtering. in B Romanowicz & M Laudon (eds), NSTI: Advanced Materials - TechConnect Briefs 2015. NSTI: Advanced Materials - TechConnect Briefs 2015, vol. 1, Taylor and Francis Inc., pp. 436-439, 10th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 18th Annual Nanotech Conference and Expo, and the 2015 National SBIR/STTR Conference, Washington, United States, 2015/06/14.

Structure and mechanical properties of Cr(Al)N/Al₂O₃ nanocomposite hard coatings fabricated by differential pumping cosputtering. / Kawasak, Masahiro; Nose, Masateru; Onishi, Ichiro et al.
NSTI: Advanced Materials - TechConnect Briefs 2015. ed. / Bart Romanowicz; Matthew Laudon. Taylor and Francis Inc., 2015. p. 436-439 (NSTI: Advanced Materials - TechConnect Briefs 2015; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Structure and mechanical properties of Cr(Al)N/Al2O3 nanocomposite hard coatings fabricated by differential pumping cosputtering

AU - Kawasak, Masahiro

AU - Nose, Masateru

AU - Onishi, Ichiro

AU - Matsuda, Kenji

AU - Shiojiri, Makoto

PY - 2015

Y1 - 2015

N2 - Cr(Al)N/Al2O3 hard coatings were fabricated by differential pumping cosputtering. Analytical electron microscopy revealed that the films sputter-deposited alternately by the CrAl and Al2O3 targets in the flow of Ar/N2 and Ar, repsectively, grew in a columnar structure normal to the substrate. In a Cr(Al)N/17 vol.% Al2O3 film prepared at a substrate rotational speed of ω = 12 rpm, each column comprised NaCl-type Cr(Al)N crystallites including homogeneously dispersive fine amorphous alumina particles (a-Al2O3). The indentation hardness (HIT) and Young's modulus (E∗) increased with increasing ω. With increasing Al2O3 fraction, they increased once and then decreased. The maxima HIT and E∗ were obtained at 17 vol.% AI2O3, and they were HIT = ∼43 GPa and E∗ = ∼350 Gpa for the coating prepared at ω = 12 rpm. The a-Al2O3 particles worked as obstacles against the deformation of the Cr(Al)N lattices.

AB - Cr(Al)N/Al2O3 hard coatings were fabricated by differential pumping cosputtering. Analytical electron microscopy revealed that the films sputter-deposited alternately by the CrAl and Al2O3 targets in the flow of Ar/N2 and Ar, repsectively, grew in a columnar structure normal to the substrate. In a Cr(Al)N/17 vol.% Al2O3 film prepared at a substrate rotational speed of ω = 12 rpm, each column comprised NaCl-type Cr(Al)N crystallites including homogeneously dispersive fine amorphous alumina particles (a-Al2O3). The indentation hardness (HIT) and Young's modulus (E∗) increased with increasing ω. With increasing Al2O3 fraction, they increased once and then decreased. The maxima HIT and E∗ were obtained at 17 vol.% AI2O3, and they were HIT = ∼43 GPa and E∗ = ∼350 Gpa for the coating prepared at ω = 12 rpm. The a-Al2O3 particles worked as obstacles against the deformation of the Cr(Al)N lattices.

KW - Analytical electron microscopy

KW - Cr(Al)N/AlO

KW - Differential pumping cosputtering

KW - Hard coating

KW - Hardness

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M3 - 会議への寄与

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T3 - NSTI: Advanced Materials - TechConnect Briefs 2015

SP - 436

EP - 439

BT - NSTI

A2 - Romanowicz, Bart

A2 - Laudon, Matthew

PB - Taylor and Francis Inc.

T2 - 10th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 18th Annual Nanotech Conference and Expo, and the 2015 National SBIR/STTR Conference

Y2 - 14 June 2015 through 17 June 2015

ER -