Preparation of Al-O-N coatings by r.f. reactive sputtering

Keyphrases

• Mechanical Properties 100%
• Aluminum Oxide 100%
• High Hardness 100%
• Annealing 100%
• Reactive Sputtering 100%
• Nitrogen Gas Flow Rate 100%
• Argon 50%
• Microstructure Properties 50%
• Nanoindentation 50%
• RF Sputtering 50%
• Ar Gas 50%
• Visible Light 50%
• Sputtering Condition 50%
• Gas Flow Rate 50%
• TEM Images 50%
• AlON 50%
• High Transparency 50%
• Dark-field TEM 50%

Engineering

• Reactive Sputtering 100%
• Gas Flowrate 100%
• Fine Grain 33%
• Deposited Film 33%
• Indentation 33%

Material Science

• Film 100%
• Gas Flow 30%
• X-Ray Diffraction 20%
• Al2O3 10%
• Annealing 10%
• Nanoindentation 10%
• Aluminum Nitride 10%
• Selected Area Diffraction 10%
• Aluminum Oxynitride 10%