@article{8f1d013220c44a3c9b7621777a69c76c,
title = "Note: Development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source",
abstract = "We report on production of volume-limited dot targets based on electron beam lithographic and sputtering technologies for use in efficient high brightness extreme ultraviolet microplasma sources. We successfully produced cylindrical tin (Sn) targets with diameters of 10, 15, and 20 μm and a height of 150 nm. The calculated spectrum around 13.5 nm was in good agreement with that obtained experimentally.",
author = "Dinh, {Thanh Hung} and Yuhei Suzuki and Ryoichi Hirose and Hiroyuki Hara and Hayato Ohashi and Bowen Li and Padraig Dunne and Gerry O'Sullivan and Atsushi Sunahara and Takeshi Higashiguchi",
note = "Publisher Copyright: {\textcopyright} 2014 AIP Publishing LLC.",
year = "2014",
month = nov,
day = "1",
doi = "10.1063/1.4901934",
language = "英語",
volume = "85",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics",
number = "11",
}