FIB induced damage examined with the low energy SEM

Šárka Mikmeková; Kenji Matsuda; Katsumi Watanabe; Susumu Ikeno; Ilona Müllerová; Luděk Frank

doi:10.2320/matertrans.MB201005

FIB induced damage examined with the low energy SEM

Šárka Mikmeková^*, Kenji Matsuda, Katsumi Watanabe, Susumu Ikeno, Ilona Müllerová, Luděk Frank

^*この論文の責任著者

材料デザイン工学科

研究成果: ジャーナルへの寄稿 › 学術論文 › 査読

13 被引用数 (Scopus)

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The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Ga⁺ ions at various energies (10,20,30, and 40keV) and incident angles (0°, 30°, 45°, and 60°). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo program SRIM2008 was used to estimate the sputtering yield and damage depth.

本文言語	英語
ページ（範囲）	292-296
ページ数	5
ジャーナル	Materials Transactions
巻	52
号	3
DOI	https://doi.org/10.2320/matertrans.MB201005
出版ステータス	出版済み - 2011/03

ASJC Scopus 主題領域

材料科学一般
凝縮系物理学
材料力学
機械工学

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10.2320/matertrans.MB201005

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title = "FIB induced damage examined with the low energy SEM",

abstract = "The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Ga+ ions at various energies (10,20,30, and 40keV) and incident angles (0°, 30°, 45°, and 60°). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo program SRIM2008 was used to estimate the sputtering yield and damage depth.",

keywords = "Beam induced damage, Focused ion beam, Scanning low energy electron microscopy, Sputtering",

author = "{\v S}{\'a}rka Mikmekov{\'a} and Kenji Matsuda and Katsumi Watanabe and Susumu Ikeno and Ilona M{\"u}llerov{\'a} and Lud{\v e}k Frank",

year = "2011",

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doi = "10.2320/matertrans.MB201005",

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volume = "52",

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T1 - FIB induced damage examined with the low energy SEM

AU - Mikmeková, Šárka

AU - Matsuda, Kenji

AU - Watanabe, Katsumi

AU - Ikeno, Susumu

AU - Müllerová, Ilona

AU - Frank, Luděk

PY - 2011/3

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N2 - The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Ga+ ions at various energies (10,20,30, and 40keV) and incident angles (0°, 30°, 45°, and 60°). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo program SRIM2008 was used to estimate the sputtering yield and damage depth.

AB - The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Ga+ ions at various energies (10,20,30, and 40keV) and incident angles (0°, 30°, 45°, and 60°). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo program SRIM2008 was used to estimate the sputtering yield and damage depth.

KW - Beam induced damage

KW - Focused ion beam

KW - Scanning low energy electron microscopy

KW - Sputtering

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SN - 1345-9678

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JO - Materials Transactions

JF - Materials Transactions

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ER -

FIB induced damage examined with the low energy SEM

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