FIB induced damage examined with the low energy SEM

Šárka Mikmeková; Kenji Matsuda; Katsumi Watanabe; Susumu Ikeno; Ilona Müllerová; Luděk Frank

doi:10.2320/matertrans.MB201005

FIB induced damage examined with the low energy SEM

Šárka Mikmeková^*, Kenji Matsuda, Katsumi Watanabe, Susumu Ikeno, Ilona Müllerová, Luděk Frank

^*Corresponding author for this work

Materials Design and Engineering

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Ga⁺ ions at various energies (10,20,30, and 40keV) and incident angles (0°, 30°, 45°, and 60°). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo program SRIM2008 was used to estimate the sputtering yield and damage depth.

Original language	English
Pages (from-to)	292-296
Number of pages	5
Journal	Materials Transactions
Volume	52
Issue number	3
DOIs	https://doi.org/10.2320/matertrans.MB201005
State	Published - 2011/03

Keywords

Beam induced damage
Focused ion beam
Scanning low energy electron microscopy
Sputtering

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.2320/matertrans.MB201005

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title = "FIB induced damage examined with the low energy SEM",

abstract = "The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Ga+ ions at various energies (10,20,30, and 40keV) and incident angles (0°, 30°, 45°, and 60°). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo program SRIM2008 was used to estimate the sputtering yield and damage depth.",

keywords = "Beam induced damage, Focused ion beam, Scanning low energy electron microscopy, Sputtering",

author = "{\v S}{\'a}rka Mikmekov{\'a} and Kenji Matsuda and Katsumi Watanabe and Susumu Ikeno and Ilona M{\"u}llerov{\'a} and Lud{\v e}k Frank",

year = "2011",

month = mar,

doi = "10.2320/matertrans.MB201005",

language = "英語",

volume = "52",

pages = "292--296",

journal = "Materials Transactions",

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publisher = "Japan Institute of Metals (JIM)",

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T1 - FIB induced damage examined with the low energy SEM

AU - Mikmeková, Šárka

AU - Matsuda, Kenji

AU - Watanabe, Katsumi

AU - Ikeno, Susumu

AU - Müllerová, Ilona

AU - Frank, Luděk

PY - 2011/3

Y1 - 2011/3

N2 - The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Ga+ ions at various energies (10,20,30, and 40keV) and incident angles (0°, 30°, 45°, and 60°). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo program SRIM2008 was used to estimate the sputtering yield and damage depth.

AB - The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Ga+ ions at various energies (10,20,30, and 40keV) and incident angles (0°, 30°, 45°, and 60°). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo program SRIM2008 was used to estimate the sputtering yield and damage depth.

KW - Beam induced damage

KW - Focused ion beam

KW - Scanning low energy electron microscopy

KW - Sputtering

UR - http://www.scopus.com/inward/record.url?scp=79955786544&partnerID=8YFLogxK

U2 - 10.2320/matertrans.MB201005

DO - 10.2320/matertrans.MB201005

M3 - 学術論文

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SN - 1345-9678

VL - 52

SP - 292

EP - 296

JO - Materials Transactions

JF - Materials Transactions

IS - 3

ER -

FIB induced damage examined with the low energy SEM

Abstract

Keywords

ASJC Scopus subject areas

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