Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

Amitava Roy; Goki Arai; Hiroyuki Hara; Takeshi Higashiguchi; Hayato Ohashi; Atsushi Sunahara; Bowen Li; Padraig Dunne; Gerry O'Sullivan; Taisuke Miura; Tomas Mocek; Akira Endo

doi:10.1063/1.4893611

Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

Amitava Roy, Goki Arai, Hiroyuki Hara, Takeshi Higashiguchi, Hayato Ohashi, Atsushi Sunahara, Bowen Li, Padraig Dunne, Gerry O'Sullivan, Taisuke Miura, Tomas Mocek, Akira Endo

教養教育学系

研究成果: ジャーナルへの寄稿 › 学術論文 › 査読

11 被引用数 (Scopus)

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We have investigated the effect of irradiation of solid Sn targets with laser pulses of sub-ns duration and sub-mJ energy on the diameter of the extreme ultraviolet (EUV) emitting region and source conversion efficiency. It was found that an in-band EUV source diameter as low as 18 μm was produced due to the short scale length of a plasma produced by a sub-ns laser. Most of the EUV emission occurs in a narrow region with a plasma density close to the critical density value. Such EUV sources are suitable for high brightness and high repetition rate metrology applications.

本文言語	英語
論文番号	074103
ジャーナル	Applied Physics Letters
巻	105
号	7
DOI	https://doi.org/10.1063/1.4893611
出版ステータス	出版済み - 2014/08/18

ASJC Scopus 主題領域

物理学および天文学（その他）

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10.1063/1.4893611

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title = "Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source",

abstract = "We have investigated the effect of irradiation of solid Sn targets with laser pulses of sub-ns duration and sub-mJ energy on the diameter of the extreme ultraviolet (EUV) emitting region and source conversion efficiency. It was found that an in-band EUV source diameter as low as 18 μm was produced due to the short scale length of a plasma produced by a sub-ns laser. Most of the EUV emission occurs in a narrow region with a plasma density close to the critical density value. Such EUV sources are suitable for high brightness and high repetition rate metrology applications.",

author = "Amitava Roy and Goki Arai and Hiroyuki Hara and Takeshi Higashiguchi and Hayato Ohashi and Atsushi Sunahara and Bowen Li and Padraig Dunne and Gerry O'Sullivan and Taisuke Miura and Tomas Mocek and Akira Endo",

year = "2014",

month = aug,

day = "18",

doi = "10.1063/1.4893611",

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volume = "105",

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T1 - Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

AU - Roy, Amitava

AU - Arai, Goki

AU - Hara, Hiroyuki

AU - Higashiguchi, Takeshi

AU - Ohashi, Hayato

AU - Sunahara, Atsushi

AU - Li, Bowen

AU - Dunne, Padraig

AU - O'Sullivan, Gerry

AU - Miura, Taisuke

AU - Mocek, Tomas

AU - Endo, Akira

PY - 2014/8/18

Y1 - 2014/8/18

N2 - We have investigated the effect of irradiation of solid Sn targets with laser pulses of sub-ns duration and sub-mJ energy on the diameter of the extreme ultraviolet (EUV) emitting region and source conversion efficiency. It was found that an in-band EUV source diameter as low as 18 μm was produced due to the short scale length of a plasma produced by a sub-ns laser. Most of the EUV emission occurs in a narrow region with a plasma density close to the critical density value. Such EUV sources are suitable for high brightness and high repetition rate metrology applications.

AB - We have investigated the effect of irradiation of solid Sn targets with laser pulses of sub-ns duration and sub-mJ energy on the diameter of the extreme ultraviolet (EUV) emitting region and source conversion efficiency. It was found that an in-band EUV source diameter as low as 18 μm was produced due to the short scale length of a plasma produced by a sub-ns laser. Most of the EUV emission occurs in a narrow region with a plasma density close to the critical density value. Such EUV sources are suitable for high brightness and high repetition rate metrology applications.

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U2 - 10.1063/1.4893611

DO - 10.1063/1.4893611

M3 - 学術論文

AN - SCOPUS:84929297628

SN - 0003-6951

VL - 105

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 7

M1 - 074103

ER -

Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

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