抄録
A novel displacement sensor was proposed based on a frequency delta-sigma modulator (FDSM) employing a microwave oscillator. To demonstrate basic operation, we fabricated a stylus surface profiler using a cylindrical cavity resonator, where one end of the cavity is replaced by a thin metal diaphragm with a stylus probe tip. Good surface profile was successfully obtained with this device. A 10 nm depth trench was clearly observed together with a 10 µm trench in a single scan without gain control. This result clearly demonstrates an extremely wide dynamic range of the FDSM displacement sensors.
| 本文言語 | 英語 |
|---|---|
| ページ（範囲） | 486-490 |
| ページ数 | 5 |
| ジャーナル | IEICE Transactions on Electronics |
| 巻 | E106.C |
| 号 | 9 |
| DOI | |
| 出版ステータス | 出版済み - 2023/09 |
ASJC Scopus 主題領域
- 電子材料、光学材料、および磁性材料
- 電子工学および電気工学