Abstract
A novel displacement sensor was proposed based on a frequency delta-sigma modulator (FDSM) employing a microwave oscillator. To demonstrate basic operation, we fabricated a stylus surface profiler using a cylindrical cavity resonator, where one end of the cavity is replaced by a thin metal diaphragm with a stylus probe tip. Good surface profile was successfully obtained with this device. A 10 nm depth trench was clearly observed together with a 10 µm trench in a single scan without gain control. This result clearly demonstrates an extremely wide dynamic range of the FDSM displacement sensors.
| Original language | English |
|---|---|
| Pages (from-to) | 486-490 |
| Number of pages | 5 |
| Journal | IEICE Transactions on Electronics |
| Volume | E106.C |
| Issue number | 9 |
| DOIs | |
| State | Published - 2023/09 |
Keywords
- delta sigma modulator
- displacement sensor
- frequency delta sigma modulator
- microwave oscillator
- surface stylus profiler
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering