VERTICAL-TYPE AMORPHOUS-SILICON MOSFET IC'S.

Hiroyuki Okada*, Yasutaka Uchida, Masakazu Arai, Shunri Oda, Masakiyo Matsumura

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

High performance vertical-type amorphous-silicon (a-Si) MOSFET have been demonstrated. Field-effect mobility was 1. 1 cm**2/Vs. A seven-stage E/E type ring oscillator has been fabricated by using the vertical-type a-Si MOSFET. The minimum propagation delay time was 95ns/stage. RS flip-flop circuit was evaluated.

Original languageEnglish
Title of host publicationConference on Solid State Devices and Materials
PublisherJapan Soc of Applied Physics
Pages51-54
Number of pages4
ISBN (Print)4930813212, 9784930813213
DOIs
StatePublished - 1987

Publication series

NameConference on Solid State Devices and Materials

ASJC Scopus subject areas

  • General Engineering

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