| Original language | Japanese |
|---|---|
| State | Published - 2011 |
| Externally published | Yes |
| Event | Microscopy and Microanalysis 2011 - Duration: 2011/01/01 → … |
Conference
| Conference | Microscopy and Microanalysis 2011 |
|---|---|
| Period | 2011/01/01 → … |
TEM Study of Aluminium Oxynitride Films Prepared by Reactive R. F.-Sputteirng
L-C. Lai, M. Nose, W-A. Chiou and A. Saiki
Research output: Contribution to conference › Presentation