Removal and characterization of focused-ion-beam-induced damaged layer on single crystal diamond surface and application to multiple depth patterning

Noritaka Kawasegi*, Seiya Kuroda, Noboru Morita, Kazuhito Nishimura, Makoto Yamaguchi, Noboru Takano

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

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Engineering