Metal Bellows Structure for Micro Device Sensing

Bilal Ahmed Mir; Tohru Sasaki; Atsushi Murakami; Akane Muranaka; Shinichiro Sugawara; Kenji Terabayashi; Kuniaki Dohda

Metal Bellows Structure for Micro Device Sensing

Bilal Ahmed Mir, Tohru Sasaki, Atsushi Murakami, Akane Muranaka, Shinichiro Sugawara, Kenji Terabayashi, Kuniaki Dohda

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Proceedings of 4th World Congress on Micro and Nano Manufacturing (WCMNM2021)
Pages	27
State	Published - 2021/09
Event	4th World Congress on Micro and Nano Manufacturing, WCMNM 2021 - Duration: 2021/09/20 → 2021/09/23

Conference

Conference	4th World Congress on Micro and Nano Manufacturing, WCMNM 2021
Period	2021/09/20 → 2021/09/23

Cite this

@inproceedings{8a7c85dd8dbb4c3e832f8264c4f9ebde,

title = "Metal Bellows Structure for Micro Device Sensing",

author = "Mir, {Bilal Ahmed} and Tohru Sasaki and Atsushi Murakami and Akane Muranaka and Shinichiro Sugawara and Kenji Terabayashi and Kuniaki Dohda",

year = "2021",

month = sep,

language = "英語",

pages = "27",

booktitle = "Proceedings of 4th World Congress on Micro and Nano Manufacturing (WCMNM2021)",

note = "4th World Congress on Micro and Nano Manufacturing, WCMNM 2021 ; Conference date: 20-09-2021 Through 23-09-2021",

}

TY - GEN

T1 - Metal Bellows Structure for Micro Device Sensing

AU - Mir, Bilal Ahmed

AU - Sasaki, Tohru

AU - Murakami, Atsushi

AU - Muranaka, Akane

AU - Sugawara, Shinichiro

AU - Terabayashi, Kenji

AU - Dohda, Kuniaki

PY - 2021/9

Y1 - 2021/9

M3 - 会議への寄与

SP - 27

BT - Proceedings of 4th World Congress on Micro and Nano Manufacturing (WCMNM2021)

T2 - 4th World Congress on Micro and Nano Manufacturing, WCMNM 2021

Y2 - 20 September 2021 through 23 September 2021

ER -