Practical method and physics of evaluation for vacancy concentration of silicon crystals by measuring low-temperature elastic softening

Hiroshi Yamada-Kaneta^*, Shotaro Baba, Yuta Nagai, Mitsuhiro Akatsu, Keisuke Mitsumoto, Takashi Yanase, Kazuki Okabe, Yasushi Ono, Yuichi Nemoto, Terutaka Goto

^*この論文の責任著者