@inproceedings{2c5a5eec449144c5b53dd09cdb7c43ed,
title = "MEMS microphones on InP substrates for high performance digital ultrasonic sensors",
abstract = "This paper describes the fabrication process of the MEMS microphones on InP substrates. The process is based on ozone ashing of the photoresist to fabricate a hollow structure. This process was demonstrated to be damage-free, and suitable for integration with HEMTs.",
keywords = "InP, analog-to-digital converter, condenser microphone, delta-sigma modulation, high electron mobility transistor, ultrasonic sensor",
author = "Shunya Fujino and Yuta Mizuno and Kazuhiro Takaoka and Masayuki Mori and Koichi Maezawa",
year = "2013",
doi = "10.1109/IMFEDK.2013.6602256",
language = "英語",
isbn = "9781467361064",
series = "IMFEDK 2013 - 2013 International Meeting for Future of Electron Devices, Kansai",
pages = "96--97",
booktitle = "IMFEDK 2013 - 2013 International Meeting for Future of Electron Devices, Kansai",
note = "2013 11th International Meeting for Future of Electron Devices, Kansai, IMFEDK 2013 ; Conference date: 05-06-2013 Through 06-06-2013",
}