TY - JOUR
T1 - Mechanical properties and oxidation resistance of CrAlN/BN nanocomposite coatings prepared by reactive dc and rf cosputtering
AU - Nose, M.
AU - Kawabata, T.
AU - Watanuki, T.
AU - Ueda, S.
AU - Fujii, K.
AU - Matsuda, K.
AU - Ikeno, S.
N1 - Funding Information:
This study was supported in part by a Grant-in-Aid for Scientific Research (B) (No. 21360359 ) from Japan Society for the Promotion of Science (JSPS) .
PY - 2011/7/25
Y1 - 2011/7/25
N2 - CrAlN/BN nanocomposite coatings were deposited through reactive cosputtering, i.e., pulsed dc and rf sputtering, of CrAl and h-BN targets, respectively. X-ray diffraction (XRD) and selected area electron-diffraction (SAED) analysis indicated that the CrAlN/BN coating consists of very fine grains of B1 structured CrAlN phase. With an increasing BN volume fraction of over 8vol.%, the nanocrystalline nature of the grains is revealed through a dispersion of fine grains in the CrAlN/BN coating. A cross-sectional observation using a transmission electron microscope (TEM) clarified that the coating demonstrating the highest level of hardness has a fiber-like structure consisting of grains that are ~20nm in width and ~50nm in length. X-ray photoelectron spectroscopy (XPS) analysis revealed that the coating consists mainly of CrAlN and h-BN phase. The indentation hardness (HIT) and effective Young's modulus (E*) of the coatings increased with the BN phase ratio, reaching a maximum value of ~46 and ~440GPa at ~7vol.% of BN phase; it then decreased moderately to ~40 and ~350GPa at 18vol.% of BN, respectively. Furthermore, CrAlN/BN coatings showed superior oxidation resistance compared with CrAlN coatings. After annealing at 800°C in air for 1h, the indentation hardness of CrAlN coatings decreased to 50% of the as-deposited hardness; in contrast, the hardness of CrAlN/BN nanocomposite coatings either stayed the same or increased, attaining a value of about 46GPa. After annealing at 900°C for 1h, the hardness of all the coatings decreased to about 40%.
AB - CrAlN/BN nanocomposite coatings were deposited through reactive cosputtering, i.e., pulsed dc and rf sputtering, of CrAl and h-BN targets, respectively. X-ray diffraction (XRD) and selected area electron-diffraction (SAED) analysis indicated that the CrAlN/BN coating consists of very fine grains of B1 structured CrAlN phase. With an increasing BN volume fraction of over 8vol.%, the nanocrystalline nature of the grains is revealed through a dispersion of fine grains in the CrAlN/BN coating. A cross-sectional observation using a transmission electron microscope (TEM) clarified that the coating demonstrating the highest level of hardness has a fiber-like structure consisting of grains that are ~20nm in width and ~50nm in length. X-ray photoelectron spectroscopy (XPS) analysis revealed that the coating consists mainly of CrAlN and h-BN phase. The indentation hardness (HIT) and effective Young's modulus (E*) of the coatings increased with the BN phase ratio, reaching a maximum value of ~46 and ~440GPa at ~7vol.% of BN phase; it then decreased moderately to ~40 and ~350GPa at 18vol.% of BN, respectively. Furthermore, CrAlN/BN coatings showed superior oxidation resistance compared with CrAlN coatings. After annealing at 800°C in air for 1h, the indentation hardness of CrAlN coatings decreased to 50% of the as-deposited hardness; in contrast, the hardness of CrAlN/BN nanocomposite coatings either stayed the same or increased, attaining a value of about 46GPa. After annealing at 900°C for 1h, the hardness of all the coatings decreased to about 40%.
KW - Cosputtering
KW - CrAlN/BN
KW - Hard coating
KW - Nanocomposite coating
KW - Oxidation resistance
UR - http://www.scopus.com/inward/record.url?scp=79959802451&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2011.02.044
DO - 10.1016/j.surfcoat.2011.02.044
M3 - 学術論文
AN - SCOPUS:79959802451
SN - 0257-8972
VL - 205
SP - S33-S37
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
IS - SUPPL. 2
ER -