TY - JOUR
T1 - Interfacial structure of erbium oxide layer on SUS316 substrate formed by MOCVD method
AU - Shinkawa, Takayuki
AU - Matsuda, Kenji
AU - Hishinuma, Yoshimitsu
AU - Nishimura, Katsuhiko
AU - Tanaka, Teruya
AU - Muroga, Takeo
AU - Sato, Takahiro
N1 - Publisher Copyright:
© 2014 The Japan Institute of Metals and Materials
PY - 2014
Y1 - 2014
N2 - The Er2O3 layer fabricated by MOCVD method on SUS316 substrates before and after hydrogen permeation test were investigated to know their surface morphology and structure by SEM and TEM. The surface morphology of this layer was granular structure with size of about 0.30.6 μm in diameter. According to the cross sectional TEM (X-TEM) observation, the Er2O3 layer with 11.3 μm thickness was formed on SUS316 substrate by MOCVD method in this research and no remarkable defects or cracks were detected. The Er2O3 layer had the columnar structure and their mean width was 0.30.5 μm, and it is also in good agreement with mean width of a single column measured by TEM observation. The growth direction of Er2O3 column was 〈110〉Er2O3, which is the same with as each sample before and after hydrogen permeation test, it strongly suggested that the Er2O3 is a better candidate material for insulating coating of a liquid lithium blanket.
AB - The Er2O3 layer fabricated by MOCVD method on SUS316 substrates before and after hydrogen permeation test were investigated to know their surface morphology and structure by SEM and TEM. The surface morphology of this layer was granular structure with size of about 0.30.6 μm in diameter. According to the cross sectional TEM (X-TEM) observation, the Er2O3 layer with 11.3 μm thickness was formed on SUS316 substrate by MOCVD method in this research and no remarkable defects or cracks were detected. The Er2O3 layer had the columnar structure and their mean width was 0.30.5 μm, and it is also in good agreement with mean width of a single column measured by TEM observation. The growth direction of Er2O3 column was 〈110〉Er2O3, which is the same with as each sample before and after hydrogen permeation test, it strongly suggested that the Er2O3 is a better candidate material for insulating coating of a liquid lithium blanket.
KW - Advanced breeding blanket system
KW - Erbium oxide
KW - Hydrogen permeation test
KW - Metal organic chemical vapor deposition (MOCVD)
KW - Microstructure
UR - http://www.scopus.com/inward/record.url?scp=84911888358&partnerID=8YFLogxK
U2 - 10.2320/matertrans.M2014287
DO - 10.2320/matertrans.M2014287
M3 - 学術論文
AN - SCOPUS:84911888358
SN - 1345-9678
VL - 55
SP - 1781
EP - 1785
JO - Materials Transactions
JF - Materials Transactions
IS - 12
ER -