Effect of micro-electrode geometry on NO₂ gas-sensing characteristics of one-dimensional tin dioxide nanostructure microsensors

Electrodes with micro-gaps are fabricated by using dc-sputtering and FIB techniques. SnO₂ nanowires are deposited on the micro-gap (1-30 μm) by suspension dropping method to fabricate a micro-gas sensor. The sensing ability of various SnO₂ micro-gap sensors is measured. A comparison between sensors reveals that the short-gap electrode has numerous advantages in terms of reliability, high sensitivity and detection of low concentrations of NO₂, while the large-gap electrode is relatively sensitive for high concentrations. Conductance measurements are carried out at different surface temperatures and NO₂ concentrations in order to investigate the effects that the gap size has on the overall sensor conductance. The results suggest that the interface between the electrode and sensitive layer has a very important role for the sensing mechanism of tin dioxide gas sensors.