A Novel Technique of Fabricating Nitride/Oxide Nanocomposite Coatings –Using Differential Pumping Co-sputtering System –

Masateru Nose, Wen-An Chiou, Tokimasa Kawabata, Yuji Hatano, Kenji Matsuda

研究成果: 会議への寄与 › 学会発表

本文言語	日本
出版ステータス	出版済み - 2012
外部発表	はい
イベント	13th International Conference on Plasma Surface Engineering (PSE2012) - 継続期間: 2012/01/01 → …

学会	13th International Conference on Plasma Surface Engineering (PSE2012)
Period	2012/01/01 → …

引用スタイル

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title = "A Novel Technique of Fabricating Nitride/Oxide Nanocomposite Coatings –Using Differential Pumping Co-sputtering System –",

author = "Masateru Nose and Wen-An Chiou and Tokimasa Kawabata and Yuji Hatano and Kenji Matsuda",

year = "2012",

language = "日本",

note = "13th International Conference on Plasma Surface Engineering (PSE2012) ; Conference date: 01-01-2012",

}

TY - CONF

T1 - A Novel Technique of Fabricating Nitride/Oxide Nanocomposite Coatings –Using Differential Pumping Co-sputtering System –

AU - Nose, Masateru

AU - Chiou, Wen-An

AU - Kawabata, Tokimasa

AU - Hatano, Yuji

AU - Matsuda, Kenji

PY - 2012

Y1 - 2012

M3 - 学会発表

T2 - 13th International Conference on Plasma Surface Engineering (PSE2012)

Y2 - 1 January 2012

ER -