TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System

Masateru Nose, Wen An Chiou, Hiroshi Takabatake, Takamasa Satho, Tokimasa Kawabata, Kenji Matsuda

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Original language	English
Pages (from-to)	1696-1697
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	18
DOIs	https://doi.org/10.1017/S1431927612010331
State	Published - 2012/07

ASJC Scopus subject areas

@article{6f2fabb3336e4c9ab9af9b3f78a1fd06,

title = "TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System",

author = "Masateru Nose and Chiou, {Wen An} and Hiroshi Takabatake and Takamasa Satho and Tokimasa Kawabata and Kenji Matsuda",

year = "2012",

month = jul,

doi = "10.1017/S1431927612010331",

language = "英語",

volume = "18",

pages = "1696--1697",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Oxford University Press",

}

TY - JOUR

T1 - TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System

AU - Nose, Masateru

AU - Chiou, Wen An

AU - Takabatake, Hiroshi

AU - Satho, Takamasa

AU - Kawabata, Tokimasa

AU - Matsuda, Kenji

PY - 2012/7

Y1 - 2012/7

UR - http://www.scopus.com/inward/record.url?scp=85008538409&partnerID=8YFLogxK

U2 - 10.1017/S1431927612010331

DO - 10.1017/S1431927612010331

M3 - 学術論文

AN - SCOPUS:85008538409

SN - 1431-9276

VL - 18

SP - 1696

EP - 1697

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

ER -