Study of the surface morphology of platinum thin films on powdery substrates prepared by the barrel sputtering system

Akira Taguchi; Mitsuhiro Inoue; Chikako Hiromi; Masaaki Tanizawa; Tomohito Kitami; Takayuki Abe

doi:10.1016/j.vacuum.2008.04.023

Study of the surface morphology of platinum thin films on powdery substrates prepared by the barrel sputtering system

Akira Taguchi, Mitsuhiro Inoue, Chikako Hiromi, Masaaki Tanizawa, Tomohito Kitami, Takayuki Abe^*

^*Corresponding author for this work

Hydrogen Isotope Research Center, Organization for Promotion of Research

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

The transition of Pt from a nanoparticle to a film on SiO₂ particles modified by the sputtering system with barrel-type powder sample holder (the barrel sputtering system). X-ray diffraction (XRD) and scanning electron microscopy (SEM) measurements reveal that the Pt nanoparticles grow in size with an increase in the duration of sputter deposition. The morphology of Pt changes from highly dispersed nanoparticles to a worm-like structure followed by a continuous Pt film, depending on the amount of Pt modified. Transmission electron microscopy (TEM) measurements reveal that the thin Pt film in the worm-like structure has a uniform thickness of approximately 2.6 nm, indicating film growth in a two-dimensional mode followed by an island mode.

Original language	English
Pages (from-to)	575-578
Number of pages	4
Journal	Vacuum
Volume	83
Issue number	3
DOIs	https://doi.org/10.1016/j.vacuum.2008.04.023
State	Published - 2008/10/15

Keywords

Barrel sputtering system
Environment friendly process
Surface coating

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films

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10.1016/j.vacuum.2008.04.023

Cite this

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title = "Study of the surface morphology of platinum thin films on powdery substrates prepared by the barrel sputtering system",

abstract = "The transition of Pt from a nanoparticle to a film on SiO2 particles modified by the sputtering system with barrel-type powder sample holder (the barrel sputtering system). X-ray diffraction (XRD) and scanning electron microscopy (SEM) measurements reveal that the Pt nanoparticles grow in size with an increase in the duration of sputter deposition. The morphology of Pt changes from highly dispersed nanoparticles to a worm-like structure followed by a continuous Pt film, depending on the amount of Pt modified. Transmission electron microscopy (TEM) measurements reveal that the thin Pt film in the worm-like structure has a uniform thickness of approximately 2.6 nm, indicating film growth in a two-dimensional mode followed by an island mode.",

keywords = "Barrel sputtering system, Environment friendly process, Surface coating",

author = "Akira Taguchi and Mitsuhiro Inoue and Chikako Hiromi and Masaaki Tanizawa and Tomohito Kitami and Takayuki Abe",

note = "Funding Information: The authors thank Prof. Susumu Ikeno (University of Toyama) for his help in TEM measurements. This work was supported in part by a Grant-in-Aid for Scientific Research from the Ministry of Education, Science, Sports and Culture of Japan.",

year = "2008",

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day = "15",

doi = "10.1016/j.vacuum.2008.04.023",

language = "英語",

volume = "83",

pages = "575--578",

journal = "Vacuum",

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publisher = "Elsevier Ltd.",

number = "3",

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T1 - Study of the surface morphology of platinum thin films on powdery substrates prepared by the barrel sputtering system

AU - Taguchi, Akira

AU - Inoue, Mitsuhiro

AU - Hiromi, Chikako

AU - Tanizawa, Masaaki

AU - Kitami, Tomohito

AU - Abe, Takayuki

N1 - Funding Information: The authors thank Prof. Susumu Ikeno (University of Toyama) for his help in TEM measurements. This work was supported in part by a Grant-in-Aid for Scientific Research from the Ministry of Education, Science, Sports and Culture of Japan.

PY - 2008/10/15

Y1 - 2008/10/15

N2 - The transition of Pt from a nanoparticle to a film on SiO2 particles modified by the sputtering system with barrel-type powder sample holder (the barrel sputtering system). X-ray diffraction (XRD) and scanning electron microscopy (SEM) measurements reveal that the Pt nanoparticles grow in size with an increase in the duration of sputter deposition. The morphology of Pt changes from highly dispersed nanoparticles to a worm-like structure followed by a continuous Pt film, depending on the amount of Pt modified. Transmission electron microscopy (TEM) measurements reveal that the thin Pt film in the worm-like structure has a uniform thickness of approximately 2.6 nm, indicating film growth in a two-dimensional mode followed by an island mode.

AB - The transition of Pt from a nanoparticle to a film on SiO2 particles modified by the sputtering system with barrel-type powder sample holder (the barrel sputtering system). X-ray diffraction (XRD) and scanning electron microscopy (SEM) measurements reveal that the Pt nanoparticles grow in size with an increase in the duration of sputter deposition. The morphology of Pt changes from highly dispersed nanoparticles to a worm-like structure followed by a continuous Pt film, depending on the amount of Pt modified. Transmission electron microscopy (TEM) measurements reveal that the thin Pt film in the worm-like structure has a uniform thickness of approximately 2.6 nm, indicating film growth in a two-dimensional mode followed by an island mode.

KW - Barrel sputtering system

KW - Environment friendly process

KW - Surface coating

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DO - 10.1016/j.vacuum.2008.04.023

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SN - 0042-207X

VL - 83

SP - 575

EP - 578

JO - Vacuum

JF - Vacuum

IS - 3

ER -

Study of the surface morphology of platinum thin films on powdery substrates prepared by the barrel sputtering system

Abstract

Keywords

ASJC Scopus subject areas

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