Keyphrases
Annealing
100%
Radio Frequency
100%
AlCrN
100%
Nanocomposite Film
100%
Reactive Co-sputtering
100%
Direct Current
100%
Current Frequency
100%
Self-hardening Effect
100%
Indentation Hardness
60%
Argon Atmosphere
20%
High-resolution Transmission Electron Microscopy (HRTEM)
20%
High Concentration
20%
Film Surface
20%
Nitrogen Atmosphere
20%
Maximum Hardness
20%
Oxygen Concentration
20%
Ar Ions
20%
Energy Dispersive X-ray Spectroscopy
20%
Amorphous Materials
20%
As-deposited Films
20%
Transmission Electron Microscopy Images
20%
Line Profiles
20%
Ion Sputtering
20%
Nanocrystalline Particles
20%
H-BN Films
20%
Self-hardening
20%
Oxidization
20%
Material Science
Film
100%
Nanocomposite Film
100%
Indentation
60%
Surface (Surface Science)
60%
Energy-Dispersive X-Ray Spectroscopy
40%
Amorphous Material
20%
High-Resolution Transmission Electron Microscopy
20%
Thin Films
20%
Nanocrystalline
20%