Abstract
A novel type of slit probe incorporating a micromachined silicon (Si) chip for millimeter-wave scanning near-field microscopy is proposed.To improve the spatial resolution and image contrast attainable in millimeter-wave microscopy, a metal-coated Si chip with a microslit aperture fabricated using a bulk micromachining technique was attached to the tip of an ordinary slit-type probe at the end of a tapered rectangular waveguide. The design and fabrication of the Si chip are described, and the results from experiments performed at U-band (40-60 GHz) frequencies to demonstrate the feasibility of this new probe configuration are presented.
| Original language | English |
|---|---|
| Pages (from-to) | 660-664 |
| Number of pages | 5 |
| Journal | Microwave and Optical Technology Letters |
| Volume | 53 |
| Issue number | 3 |
| DOIs | |
| State | Published - 2011/03 |
Keywords
- bulk micromachining
- millimeter-wave imaging
- near-field probes
- scanning near-field microscopy
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering