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Nanostructured CrAlN films prepared at different pulse widths by pulsed DC reactive sputtering in facing target type system
Sara Khamseh*, Masateru Nose, Shohei Ueda, Tokimasa Kawabata, Takekazu Nagae, Kenji Matsuda, Susumu Ikeno
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
8
Scopus
citations