Microstructure and properties of AlN/SiOx nanocomposite films preparedby differential pumping co-sputtering system

T. Sato, H. Takabatake, T. Kawabata, K.Matsuda, W-A. Chiou, M. Shiojiri, M. Nose

Research output: Contribution to conference › Presentation

Original language	Japanese
State	Published - 2012
Externally published	Yes
Event	9th Polish-Japanese Joint Seminar on Micro and Nano Analysis, 10-13 September 2012 Sieniawa, Poland - Duration: 2012/09/10 → …

Other	9th Polish-Japanese Joint Seminar on Micro and Nano Analysis, 10-13 September 2012 Sieniawa, Poland
Period	2012/09/10 → …

Cite this

@conference{1fee1cd4046e4ae487f8d2eb59a74eb8,

title = "Microstructure and properties of AlN/SiOx nanocomposite films preparedby differential pumping co-sputtering system",

author = "T. Sato and H. Takabatake and T. Kawabata and K.Matsuda and W-A. Chiou and M. Shiojiri and M. Nose",

year = "2012",

language = "日本",

note = "9th Polish-Japanese Joint Seminar on Micro and Nano Analysis, 10-13 September 2012 Sieniawa, Poland ; Conference date: 10-09-2012",

}

TY - CONF

T1 - Microstructure and properties of AlN/SiOx nanocomposite films preparedby differential pumping co-sputtering system

AU - Sato, T.

AU - Takabatake, H.

AU - Kawabata, T.

AU - K.Matsuda,

AU - Chiou, W-A.

AU - Shiojiri, M.

AU - Nose, M.

PY - 2012

Y1 - 2012

M3 - 学会発表

T2 - 9th Polish-Japanese Joint Seminar on Micro and Nano Analysis, 10-13 September 2012 Sieniawa, Poland

Y2 - 10 September 2012

ER -