Measurement of deuterium and helium by glow-discharge optical emission spectroscopy for plasma-surface interaction studies

To examine the resolution of isotope analysis of hydrogen with glow-discharge optical emission spectroscopy (GDOES), depth profiles of hydrogen and deuterium in a H-containing Ta/D-containing Ti/Ni layered structure were measured. The depth profiles of deuterium could be measured with sufficient resolution in the presence of relatively large amounts of hydrogen and vice versa. In addition, measurements of depth profiles of He implanted in W at room temperature were also performed with Ne plasma. The intensity of the He emissions was sufficiently high at a fluence of 10 ²⁰ He m ^-2 or higher. The depth profiles of He measured in this manner were in good agreement with the results of cross-sectional observations using a transmission electron microscope. Therefore, it was concluded that GDOES with Ne plasma is a promising technique for the depth profile analysis of plasma-facing materials and deposited layers formed on them.