Fully self-aligned amorphous-silicon mos transistors

Keyphrases

• MOS Transistor 100%
• Self-aligned 100%
• Amorphous Silicon 100%
• Source Area 50%
• On-off Ratio 50%
• Field-effect Mobility 50%
• Active Regions 50%
• Glass Substrate 50%
• Transistor 50%
• Metal Electrode 50%
• Multilayer Structure 50%
• Photomask 50%
• Drain Regions 50%
• Silicon Nitride Layer 50%
• Contact Metal 50%
• All-position 50%
• Photolithographic 50%
• Contact Holes 50%

Engineering

• Current Ratio 100%
• Nitride Layer 100%
• Drain Region 100%
• Source Region 100%
• Active Region 100%
• Glass Substrate 100%
• Laminate 100%

Material Science

• Transistor 100%
• Amorphous Silicon 100%
• Silicon Nitride 33%
• Laminate 33%