Formation of Erbia-Yttria double layer fabricated by metal organic chemical vapor deposition process with changing oxygen flow rates

Seungwon Lee, Kenji Matsuda*, Masaki Tanaka, Taiki Tsuchiya, Katsuhiko Nishimura, Yoshimitsu Hishinuma, Teruya Tanaka, Takeo Muroga

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

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Engineering

Material Science

Chemical Engineering