Fabrication of DLC films by pulsed ion beam ablation in a dense plasma focus device

Z. P. Wang; H. R. Yousefi; Y. Nishino; H. Ito; K. Masugata

doi:10.1016/j.physleta.2009.09.033

Fabrication of DLC films by pulsed ion beam ablation in a dense plasma focus device

Z. P. Wang^*, H. R. Yousefi, Y. Nishino, H. Ito, K. Masugata

^*Corresponding author for this work

Electric and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

32 Scopus citations

Abstract

The pulsed intense ion beam, emitted from a dense plasma focus (DPF) discharges performed with hydrogen gas, has been used to ablate the graphite target depositing diamond-like carbon (DLC) films on Si substrates. The substrates were mounted on a holder, which allowed for deposition at positions between normal and 20° off-normal to the target. The samples were removed for analysis after 10 and 20 shots. Nano-particles were observed in the films by a field-emission scanning electron microscope. Raman spectra indicate that sample deposited at 20° off-normal with 20 shots possesses the highest sp³ content among the samples. The film deposited at this position was also found has the highest hardness.

Original language	English
Pages (from-to)	4169-4173
Number of pages	5
Journal	Physics Letters, Section A: General, Atomic and Solid State Physics
Volume	373
Issue number	45
DOIs	https://doi.org/10.1016/j.physleta.2009.09.033
State	Published - 2009/11/02

Keywords

Dense plasma focus (DPF)
Diamond-like carbon (DLC)
Pulsed ion beam ablation

ASJC Scopus subject areas

General Physics and Astronomy

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10.1016/j.physleta.2009.09.033

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title = "Fabrication of DLC films by pulsed ion beam ablation in a dense plasma focus device",

abstract = "The pulsed intense ion beam, emitted from a dense plasma focus (DPF) discharges performed with hydrogen gas, has been used to ablate the graphite target depositing diamond-like carbon (DLC) films on Si substrates. The substrates were mounted on a holder, which allowed for deposition at positions between normal and 20° off-normal to the target. The samples were removed for analysis after 10 and 20 shots. Nano-particles were observed in the films by a field-emission scanning electron microscope. Raman spectra indicate that sample deposited at 20° off-normal with 20 shots possesses the highest sp3 content among the samples. The film deposited at this position was also found has the highest hardness.",

keywords = "Dense plasma focus (DPF), Diamond-like carbon (DLC), Pulsed ion beam ablation",

author = "Wang, {Z. P.} and Yousefi, {H. R.} and Y. Nishino and H. Ito and K. Masugata",

year = "2009",

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doi = "10.1016/j.physleta.2009.09.033",

language = "英語",

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journal = "Physics Letters, Section A: General, Atomic and Solid State Physics",

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T1 - Fabrication of DLC films by pulsed ion beam ablation in a dense plasma focus device

AU - Wang, Z. P.

AU - Yousefi, H. R.

AU - Nishino, Y.

AU - Ito, H.

AU - Masugata, K.

PY - 2009/11/2

Y1 - 2009/11/2

N2 - The pulsed intense ion beam, emitted from a dense plasma focus (DPF) discharges performed with hydrogen gas, has been used to ablate the graphite target depositing diamond-like carbon (DLC) films on Si substrates. The substrates were mounted on a holder, which allowed for deposition at positions between normal and 20° off-normal to the target. The samples were removed for analysis after 10 and 20 shots. Nano-particles were observed in the films by a field-emission scanning electron microscope. Raman spectra indicate that sample deposited at 20° off-normal with 20 shots possesses the highest sp3 content among the samples. The film deposited at this position was also found has the highest hardness.

AB - The pulsed intense ion beam, emitted from a dense plasma focus (DPF) discharges performed with hydrogen gas, has been used to ablate the graphite target depositing diamond-like carbon (DLC) films on Si substrates. The substrates were mounted on a holder, which allowed for deposition at positions between normal and 20° off-normal to the target. The samples were removed for analysis after 10 and 20 shots. Nano-particles were observed in the films by a field-emission scanning electron microscope. Raman spectra indicate that sample deposited at 20° off-normal with 20 shots possesses the highest sp3 content among the samples. The film deposited at this position was also found has the highest hardness.

KW - Dense plasma focus (DPF)

KW - Diamond-like carbon (DLC)

KW - Pulsed ion beam ablation

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Fabrication of DLC films by pulsed ion beam ablation in a dense plasma focus device

Abstract

Keywords

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