Evaluation of uniformity for organic film evaporation using two dimensional different apertures

We have demonstrated an evaporation method to obtain a uniform organic thin-films with designed evaporation source which have array of two dimensional apertures of different sizes above an evaporation source optimized the distance between evaporation source and substrate, a uniform film was formed. Experimental results varying with position of the substrate are fitted to the theory of evaporation and the simulation of film uniformity using the uniform evaporation method was examined. In the simulation, different diameters of each apertures and distance between the evaporation source and the substrate were investigated. When the distance between the evaporation source and the substrate was 7 mm, adjusting the diameters of each apertures, the simulation uniform of film thickness of ±3.9 and ±1.0% at array of 3 × 3 and 9 × 9 apertures of different sizes was achieved in simulation, respectively. Moreover, in the evaporation experiment using array of 3 × 3 apertures, the uniformity of ±6.5% was obtained by photoluminescence measurement.