TY - JOUR
T1 - EUV emission spectra from excited multiply charged xenon ions produced in charge-transfer collisions
AU - Tanuma, H.
AU - Ohashi, H.
AU - Shibuya, E.
AU - Kobayashi, N.
AU - Okuno, T.
AU - Fujioka, S.
AU - Nishimura, H.
AU - Nishihara, K.
N1 - Funding Information:
The authors are grateful for discussions with A. Sasaki and other members of the working group for the EUV modeling. This work was financially supported in part by MEXT (Ministry of Education, Culture, Science and Technology, Japan) under contract subject “Leading Project for EUV lithography source development”.
PY - 2005/7
Y1 - 2005/7
N2 - The extreme ultra-violet spectra of multiply charged xenon ions in the wavelength range of 6-24 nm are measured following the electron capture into excited states of slow Xeq+ (8 ≤ q ≤ 16) ions passing through He gas target to provide the spectroscopic information about Xe ions. The charge-state dependence of the 4d-nl (nl = 4f, 5p and 5f) transitions is obtained. Identification of the transition has been carried out by the comparison with the results of the previous theoretical calculation. The mechanisms of the electron capture and the optical emission are discussed utilizing the classical over-the-barrier model.
AB - The extreme ultra-violet spectra of multiply charged xenon ions in the wavelength range of 6-24 nm are measured following the electron capture into excited states of slow Xeq+ (8 ≤ q ≤ 16) ions passing through He gas target to provide the spectroscopic information about Xe ions. The charge-state dependence of the 4d-nl (nl = 4f, 5p and 5f) transitions is obtained. Identification of the transition has been carried out by the comparison with the results of the previous theoretical calculation. The mechanisms of the electron capture and the optical emission are discussed utilizing the classical over-the-barrier model.
KW - Charge transfer
KW - Extreme ultra-violet emission
KW - Xenon ion
UR - http://www.scopus.com/inward/record.url?scp=20144363851&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2005.03.200
DO - 10.1016/j.nimb.2005.03.200
M3 - 会議記事
AN - SCOPUS:20144363851
SN - 0168-583X
VL - 235
SP - 331
EP - 336
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 1-4
T2 - The Physics of Highly Charged Ions Proceedings of the Twelfth International Conference on the Physics of Highly Charged Ions (HCI-2004)
Y2 - 6 September 2004 through 11 September 2004
ER -