Effect of Cu²⁺ ion irradiation on microstructure of Er₂O₃ coating layer formed by MOCVD method

Erbium oxide (Er2O3) coating is one of the promising methods to restrict tritium permeation and the magneto hydrodynamic pressure drop for advanced breeding blanket systems. Er2O3 coating layer on large interior surface area of metal pipe is deposited by using metal organic chemical vapor deposition process. In this work, the influence of Cu²⁺ ion irradiation on microstructure of Er2O3 coating layer on stainless steel 316 (SUS 316) substrate by metal organic chemical vapor deposition methods was investigated using scanning electron microscopy, transmission electron microscopy observation and X-ray di raction analysis. Microstructure observation of Er2O3 coating was carried out after 0.00-1.50 dpa Cu²⁺ ion irradiation at 298 K and 773 K. Scanning electron microscopy observation of the surface area on Er2O3 thin film revealed the crack generation on surface after Cu²⁺ ion irradiation. X-ray di raction peaks were identified in Er2O3 after Cu²⁺ ion irradiation transmission electron microscopy observations, the formation of interlayer between Er2O3 coating and SUS substrate was confirmed. According to transmission electron microscopy-energy dispersive spectroscopy, the interlayer includes Fe and Cr.