Deposition of DLC films using intense pulsed beam in plasma focus device

Hiroaki Ito; Youhei Nakata; Zhiping Wang

doi:10.1541/ieejfms.137.559

Deposition of DLC films using intense pulsed beam in plasma focus device

Hiroaki Ito^*, Youhei Nakata, Zhiping Wang

^*Corresponding author for this work

Electric and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Diamond like carbon (DLC) films were deposited on the silicon substrate using the dense plasm focus (DPF) device. The intense pulsed ion and electron beams, emitted from the DPF device with hydrogen as filling gas at 300 Pa, have been used to ablate the graphite target depositing DLC films. The deposited samples were analyzed for their hardness, structure and chemical composition by nano-indenter, X-ray diffraction and Raman spectroscopy, respectively. Raman studies verified the formation of DLC films with D and G peaks. Raman spectra indicated that samples deposited by the electron beam ablation possessed higher sp³ content. Studies of film plastic hardness with a nano-indenter found that the DLC films deposited by the electron beam ablation have three times higher mechanical hardness than those by the ion beam ablation. Hardness results were in good agreement with Raman results.

Original language	English
Pages (from-to)	559-563
Number of pages	5
Journal	IEEJ Transactions on Fundamentals and Materials
Volume	137
Issue number	10
DOIs	https://doi.org/10.1541/ieejfms.137.559
State	Published - 2017

Keywords

Ablation plasma
Diamond like carbon
Plasma focus device
Pulsed charged particle beam

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1541/ieejfms.137.559

Cite this

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title = "Deposition of DLC films using intense pulsed beam in plasma focus device",

abstract = "Diamond like carbon (DLC) films were deposited on the silicon substrate using the dense plasm focus (DPF) device. The intense pulsed ion and electron beams, emitted from the DPF device with hydrogen as filling gas at 300 Pa, have been used to ablate the graphite target depositing DLC films. The deposited samples were analyzed for their hardness, structure and chemical composition by nano-indenter, X-ray diffraction and Raman spectroscopy, respectively. Raman studies verified the formation of DLC films with D and G peaks. Raman spectra indicated that samples deposited by the electron beam ablation possessed higher sp3 content. Studies of film plastic hardness with a nano-indenter found that the DLC films deposited by the electron beam ablation have three times higher mechanical hardness than those by the ion beam ablation. Hardness results were in good agreement with Raman results.",

keywords = "Ablation plasma, Diamond like carbon, Plasma focus device, Pulsed charged particle beam",

author = "Hiroaki Ito and Youhei Nakata and Zhiping Wang",

note = "Publisher Copyright: {\textcopyright} 2017 The Institute of Electrical Engineers of Japan.",

year = "2017",

doi = "10.1541/ieejfms.137.559",

language = "英語",

volume = "137",

pages = "559--563",

journal = "IEEJ Transactions on Fundamentals and Materials",

issn = "0385-4205",

publisher = "The Institute of Electrical Engineers of Japan",

number = "10",

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TY - JOUR

T1 - Deposition of DLC films using intense pulsed beam in plasma focus device

AU - Ito, Hiroaki

AU - Nakata, Youhei

AU - Wang, Zhiping

PY - 2017

Y1 - 2017

N2 - Diamond like carbon (DLC) films were deposited on the silicon substrate using the dense plasm focus (DPF) device. The intense pulsed ion and electron beams, emitted from the DPF device with hydrogen as filling gas at 300 Pa, have been used to ablate the graphite target depositing DLC films. The deposited samples were analyzed for their hardness, structure and chemical composition by nano-indenter, X-ray diffraction and Raman spectroscopy, respectively. Raman studies verified the formation of DLC films with D and G peaks. Raman spectra indicated that samples deposited by the electron beam ablation possessed higher sp3 content. Studies of film plastic hardness with a nano-indenter found that the DLC films deposited by the electron beam ablation have three times higher mechanical hardness than those by the ion beam ablation. Hardness results were in good agreement with Raman results.

AB - Diamond like carbon (DLC) films were deposited on the silicon substrate using the dense plasm focus (DPF) device. The intense pulsed ion and electron beams, emitted from the DPF device with hydrogen as filling gas at 300 Pa, have been used to ablate the graphite target depositing DLC films. The deposited samples were analyzed for their hardness, structure and chemical composition by nano-indenter, X-ray diffraction and Raman spectroscopy, respectively. Raman studies verified the formation of DLC films with D and G peaks. Raman spectra indicated that samples deposited by the electron beam ablation possessed higher sp3 content. Studies of film plastic hardness with a nano-indenter found that the DLC films deposited by the electron beam ablation have three times higher mechanical hardness than those by the ion beam ablation. Hardness results were in good agreement with Raman results.

KW - Ablation plasma

KW - Diamond like carbon

KW - Plasma focus device

KW - Pulsed charged particle beam

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U2 - 10.1541/ieejfms.137.559

DO - 10.1541/ieejfms.137.559

M3 - 学術論文

AN - SCOPUS:85030158321

SN - 0385-4205

VL - 137

SP - 559

EP - 563

JO - IEEJ Transactions on Fundamentals and Materials

JF - IEEJ Transactions on Fundamentals and Materials

IS - 10

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Deposition of DLC films using intense pulsed beam in plasma focus device

Abstract

Keywords

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