Keyphrases
Adhesion
12%
Al2O3 Coating
37%
Al2O3 Layer
25%
AlCrN
100%
Aluminum Oxide
100%
Buffer Layer
25%
Co-sputtering
100%
Columnar Structure
12%
CrAl
12%
Crystallites
12%
Differential Pump
100%
Fine Particles
12%
Homogeneously Dispersed
12%
Magneton Sputtering
12%
Mechanical Properties
100%
Metal Substrate
12%
Nanocomposite Layer
12%
Nanoindentation Hardness
12%
Nitride Coatings
12%
Nitrided Layer
12%
Nitrides
12%
Radio Frequency
12%
Rotational Speed
12%
Si Substrate
12%
Sodium Chloride
12%
Structure-property Relationships
100%
Substrate Holder
12%
Substrate Surface
12%
Superhard Coatings
100%
Two-chamber
12%
Young's Modulus
12%
α-Al2O3
12%
Material Science
Al2O3
100%
Buffer Layer
18%
Crystallite
9%
Fine Particle
9%
Nanocomposite
9%
Nanoindentation
9%
Nitride Compound
27%
Phase Composition
9%
Surface (Surface Science)
9%
Young's Modulus
9%