Characterization of titanium particles treated with N2 plasma using a barrel-plasma-treatment system

Keisuke Matsubara; Masato Danno; Mitsuhiro Inoue; Yuji Honda; Naoaki Yoshida; Takayuki Abe

doi:10.1039/c3cp44434a

Characterization of titanium particles treated with N₂ plasma using a barrel-plasma-treatment system

Keisuke Matsubara, Masato Danno, Mitsuhiro Inoue, Yuji Honda, Naoaki Yoshida, Takayuki Abe^*

^*Corresponding author for this work

Hydrogen Isotope Research Center, Organization for Promotion of Research

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

Metallic titanium (Ti) particles treated with N₂ plasma via the barrel-plasma-treatment system were thoroughly evaluated, to investigate changes in physical and chemical properties resulting from the treatment. The color of the Ti particles changed from gray to uniform brown upon plasma-treatment, indicating good surface uniformity. Depth profiling using X-ray photoelectron spectroscopy showed that the nitrogen implanted by plasma-treatment formed Ti-N bonds at or near the surface of the particles, resulting in the formation of a stoichiometric TiN layer. It was determined from cross-sectional transmission electron microscopy and nanobeam diffraction measurements that the resulting TiN layer had two different structures. Nanoindentation data showed that the surface of a treated sample was about five times harder than that of untreated particles.

Original language	English
Pages (from-to)	5097-5107
Number of pages	11
Journal	Physical Chemistry Chemical Physics
Volume	15
Issue number	14
DOIs	https://doi.org/10.1039/c3cp44434a
State	Published - 2013/04/14

ASJC Scopus subject areas

General Physics and Astronomy
Physical and Theoretical Chemistry

Access to Document

10.1039/c3cp44434a

Cite this

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title = "Characterization of titanium particles treated with N2 plasma using a barrel-plasma-treatment system",

abstract = "Metallic titanium (Ti) particles treated with N2 plasma via the barrel-plasma-treatment system were thoroughly evaluated, to investigate changes in physical and chemical properties resulting from the treatment. The color of the Ti particles changed from gray to uniform brown upon plasma-treatment, indicating good surface uniformity. Depth profiling using X-ray photoelectron spectroscopy showed that the nitrogen implanted by plasma-treatment formed Ti-N bonds at or near the surface of the particles, resulting in the formation of a stoichiometric TiN layer. It was determined from cross-sectional transmission electron microscopy and nanobeam diffraction measurements that the resulting TiN layer had two different structures. Nanoindentation data showed that the surface of a treated sample was about five times harder than that of untreated particles.",

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AU - Matsubara, Keisuke

AU - Danno, Masato

AU - Inoue, Mitsuhiro

AU - Honda, Yuji

AU - Yoshida, Naoaki

AU - Abe, Takayuki

PY - 2013/4/14

Y1 - 2013/4/14

N2 - Metallic titanium (Ti) particles treated with N2 plasma via the barrel-plasma-treatment system were thoroughly evaluated, to investigate changes in physical and chemical properties resulting from the treatment. The color of the Ti particles changed from gray to uniform brown upon plasma-treatment, indicating good surface uniformity. Depth profiling using X-ray photoelectron spectroscopy showed that the nitrogen implanted by plasma-treatment formed Ti-N bonds at or near the surface of the particles, resulting in the formation of a stoichiometric TiN layer. It was determined from cross-sectional transmission electron microscopy and nanobeam diffraction measurements that the resulting TiN layer had two different structures. Nanoindentation data showed that the surface of a treated sample was about five times harder than that of untreated particles.

AB - Metallic titanium (Ti) particles treated with N2 plasma via the barrel-plasma-treatment system were thoroughly evaluated, to investigate changes in physical and chemical properties resulting from the treatment. The color of the Ti particles changed from gray to uniform brown upon plasma-treatment, indicating good surface uniformity. Depth profiling using X-ray photoelectron spectroscopy showed that the nitrogen implanted by plasma-treatment formed Ti-N bonds at or near the surface of the particles, resulting in the formation of a stoichiometric TiN layer. It was determined from cross-sectional transmission electron microscopy and nanobeam diffraction measurements that the resulting TiN layer had two different structures. Nanoindentation data showed that the surface of a treated sample was about five times harder than that of untreated particles.

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