Characteristics of nanostructured Cr-B films produced by RF magnetron sputtering

Masakazu Mori; Toshiya Shibayanagi; Masakatsu Maeda; Masaaki Naka

doi:10.1016/S1359-6462(01)00857-0

Characteristics of nanostructured Cr-B films produced by RF magnetron sputtering

Masakazu Mori^*, Toshiya Shibayanagi, Masakatsu Maeda, Masaaki Naka

^*Corresponding author for this work

Materials Design and Engineering

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

Nanostructured Cr-B binary alloy films were fabricated using the RF-magnetron sputtering method. The films were characterized focusing on microstructure, mechanical properties and thermal stability. Microstructural evaluation was performed using XRD, EPMA and TEM techniques. While grain size was measured using TEM observations. Mechanical properties were evaluated via microhardness tests at room temperature. The thermal stability was investigated while the samples were being annealed isochronally and isothermally in vacuum.

Original language	English
Pages (from-to)	2035-2038
Number of pages	4
Journal	Scripta Materialia
Volume	44
Issue number	8-9
DOIs	https://doi.org/10.1016/S1359-6462(01)00857-0
State	Published - 2001/05/18

Keywords

Cr-B alloy
Hardness
Nanostructure
Sputtering
Thermal stability

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering
Metals and Alloys

Access to Document

10.1016/S1359-6462(01)00857-0

Cite this

@article{1347b7f799694ef5b18bfbf2ac5ddc1b,

title = "Characteristics of nanostructured Cr-B films produced by RF magnetron sputtering",

abstract = "Nanostructured Cr-B binary alloy films were fabricated using the RF-magnetron sputtering method. The films were characterized focusing on microstructure, mechanical properties and thermal stability. Microstructural evaluation was performed using XRD, EPMA and TEM techniques. While grain size was measured using TEM observations. Mechanical properties were evaluated via microhardness tests at room temperature. The thermal stability was investigated while the samples were being annealed isochronally and isothermally in vacuum.",

keywords = "Cr-B alloy, Hardness, Nanostructure, Sputtering, Thermal stability",

author = "Masakazu Mori and Toshiya Shibayanagi and Masakatsu Maeda and Masaaki Naka",

year = "2001",

month = may,

day = "18",

doi = "10.1016/S1359-6462(01)00857-0",

language = "英語",

volume = "44",

pages = "2035--2038",

journal = "Scripta Materialia",

issn = "1359-6462",

publisher = "Acta Materialia Inc",

number = "8-9",

}

TY - JOUR

T1 - Characteristics of nanostructured Cr-B films produced by RF magnetron sputtering

AU - Mori, Masakazu

AU - Shibayanagi, Toshiya

AU - Maeda, Masakatsu

AU - Naka, Masaaki

PY - 2001/5/18

Y1 - 2001/5/18

N2 - Nanostructured Cr-B binary alloy films were fabricated using the RF-magnetron sputtering method. The films were characterized focusing on microstructure, mechanical properties and thermal stability. Microstructural evaluation was performed using XRD, EPMA and TEM techniques. While grain size was measured using TEM observations. Mechanical properties were evaluated via microhardness tests at room temperature. The thermal stability was investigated while the samples were being annealed isochronally and isothermally in vacuum.

AB - Nanostructured Cr-B binary alloy films were fabricated using the RF-magnetron sputtering method. The films were characterized focusing on microstructure, mechanical properties and thermal stability. Microstructural evaluation was performed using XRD, EPMA and TEM techniques. While grain size was measured using TEM observations. Mechanical properties were evaluated via microhardness tests at room temperature. The thermal stability was investigated while the samples were being annealed isochronally and isothermally in vacuum.

KW - Cr-B alloy

KW - Hardness

KW - Nanostructure

KW - Sputtering

KW - Thermal stability

UR - http://www.scopus.com/inward/record.url?scp=0035906647&partnerID=8YFLogxK

U2 - 10.1016/S1359-6462(01)00857-0

DO - 10.1016/S1359-6462(01)00857-0

M3 - 学術論文

AN - SCOPUS:0035906647

SN - 1359-6462

VL - 44

SP - 2035

EP - 2038

JO - Scripta Materialia

JF - Scripta Materialia

IS - 8-9

ER -

Characteristics of nanostructured Cr-B films produced by RF magnetron sputtering

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Fingerprint

Cite this