Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasma

Takeshi Higashiguchi; Bowen Li; Yuhei Suzuki; Masato Kawasaki; Hayato Ohashi; Shuichi Torii; Daisuke Nakamura; Akihiko Takahashi; Tatsuo Okada; Weihua Jiang; Taisuke Miura; Akira Endo; Padraig Dunne; Gerry O'Sullivan; Tetsuya Makimura

doi:10.1364/OE.21.031837

Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasma

Takeshi Higashiguchi, Bowen Li, Yuhei Suzuki, Masato Kawasaki, Hayato Ohashi, Shuichi Torii, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Weihua Jiang, Taisuke Miura, Akira Endo, Padraig Dunne, Gerry O'Sullivan, Tetsuya Makimura

Faculty of Liberal Arts and Sciences

Research output: Contribution to journal › Article › peer-review

47 Scopus citations

Abstract

We characterize extreme ultraviolet (EUV) emission from mid-infrared (mid-IR) laser-produced plasmas (LPPs) of the rare-earth element Gd. The energy conversion efficiency (CE) and the spectral purity in the mid-IR LPPs at λL = 10.6 μm were higher than for solid-state LPPs at λL = 1.06 μm, because the plasma produced is optically thin due to the lower critical density, resulting in a CE of 0.7%. The peak wavelength remained fixed at 6.76 nm for all laser intensities studied. Plasma parameters at a mid-IR laser intensity of 1.3×1011 W/cm² was also evaluated by use of the hydrodynamic simulation code to produce the EUV emission at 6.76 nm.

Original language	English
Pages (from-to)	31837-31845
Number of pages	9
Journal	Optics Express
Volume	21
Issue number	26
DOIs	https://doi.org/10.1364/OE.21.031837
State	Published - 2013/12/30

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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Higashiguchi, T., Li, B., Suzuki, Y., Kawasaki, M., Ohashi, H., Torii, S., Nakamura, D., Takahashi, A., Okada, T., Jiang, W., Miura, T., Endo, A., Dunne, P., O'Sullivan, G., & Makimura, T. (2013). Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasma. Optics Express, 21(26), 31837-31845. https://doi.org/10.1364/OE.21.031837

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title = "Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasma",

abstract = "We characterize extreme ultraviolet (EUV) emission from mid-infrared (mid-IR) laser-produced plasmas (LPPs) of the rare-earth element Gd. The energy conversion efficiency (CE) and the spectral purity in the mid-IR LPPs at λL = 10.6 μm were higher than for solid-state LPPs at λL = 1.06 μm, because the plasma produced is optically thin due to the lower critical density, resulting in a CE of 0.7%. The peak wavelength remained fixed at 6.76 nm for all laser intensities studied. Plasma parameters at a mid-IR laser intensity of 1.3×1011 W/cm2 was also evaluated by use of the hydrodynamic simulation code to produce the EUV emission at 6.76 nm.",

author = "Takeshi Higashiguchi and Bowen Li and Yuhei Suzuki and Masato Kawasaki and Hayato Ohashi and Shuichi Torii and Daisuke Nakamura and Akihiko Takahashi and Tatsuo Okada and Weihua Jiang and Taisuke Miura and Akira Endo and Padraig Dunne and Gerry O'Sullivan and Tetsuya Makimura",

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doi = "10.1364/OE.21.031837",

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Higashiguchi, T, Li, B, Suzuki, Y, Kawasaki, M, Ohashi, H, Torii, S, Nakamura, D, Takahashi, A, Okada, T, Jiang, W, Miura, T, Endo, A, Dunne, P, O'Sullivan, G & Makimura, T 2013, 'Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasma', Optics Express, vol. 21, no. 26, pp. 31837-31845. https://doi.org/10.1364/OE.21.031837

TY - JOUR

T1 - Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasma

AU - Higashiguchi, Takeshi

AU - Li, Bowen

AU - Suzuki, Yuhei

AU - Kawasaki, Masato

AU - Ohashi, Hayato

AU - Torii, Shuichi

AU - Nakamura, Daisuke

AU - Takahashi, Akihiko

AU - Okada, Tatsuo

AU - Jiang, Weihua

AU - Miura, Taisuke

AU - Endo, Akira

AU - Dunne, Padraig

AU - O'Sullivan, Gerry

AU - Makimura, Tetsuya

PY - 2013/12/30

Y1 - 2013/12/30

N2 - We characterize extreme ultraviolet (EUV) emission from mid-infrared (mid-IR) laser-produced plasmas (LPPs) of the rare-earth element Gd. The energy conversion efficiency (CE) and the spectral purity in the mid-IR LPPs at λL = 10.6 μm were higher than for solid-state LPPs at λL = 1.06 μm, because the plasma produced is optically thin due to the lower critical density, resulting in a CE of 0.7%. The peak wavelength remained fixed at 6.76 nm for all laser intensities studied. Plasma parameters at a mid-IR laser intensity of 1.3×1011 W/cm2 was also evaluated by use of the hydrodynamic simulation code to produce the EUV emission at 6.76 nm.

AB - We characterize extreme ultraviolet (EUV) emission from mid-infrared (mid-IR) laser-produced plasmas (LPPs) of the rare-earth element Gd. The energy conversion efficiency (CE) and the spectral purity in the mid-IR LPPs at λL = 10.6 μm were higher than for solid-state LPPs at λL = 1.06 μm, because the plasma produced is optically thin due to the lower critical density, resulting in a CE of 0.7%. The peak wavelength remained fixed at 6.76 nm for all laser intensities studied. Plasma parameters at a mid-IR laser intensity of 1.3×1011 W/cm2 was also evaluated by use of the hydrodynamic simulation code to produce the EUV emission at 6.76 nm.

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DO - 10.1364/OE.21.031837

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SN - 1094-4087

VL - 21

SP - 31837

EP - 31845

JO - Optics Express

JF - Optics Express

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ER -

Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasma

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