Characteristics of electron cyclotron resonance plasma generated in a rectangular waveguide by high-power microwave

Lekha Nath Mishra; Kanetoshi Shibata; Hiroaki Ito; Noboru Yugami; Yasushi Nishida

doi:10.1063/1.1630858

Characteristics of electron cyclotron resonance plasma generated in a rectangular waveguide by high-power microwave

Lekha Nath Mishra^*, Kanetoshi Shibata, Hiroaki Ito, Noboru Yugami, Yasushi Nishida

^*Corresponding author for this work

Electric and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

The generation of overdense plasma using an electron cycltron resonance (ECR) technique in a rectangular waveguide by high power microwave, was discussed. The plasma density about 10¹² cm^-3 and electron temperature 8 - 12 eV were observed using a Langmuir probe. It was shown that these parameters can be cntrolled by adjusting the magnetic fields, gas pressure and/or microwave power. This plasma can be used in plasma processing and for the plasma-based particle accelerator.

Original language	English
Pages (from-to)	84-89
Number of pages	6
Journal	Review of Scientific Instruments
Volume	75
Issue number	1
DOIs	https://doi.org/10.1063/1.1630858
State	Published - 2004/01

ASJC Scopus subject areas

Instrumentation

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10.1063/1.1630858

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title = "Characteristics of electron cyclotron resonance plasma generated in a rectangular waveguide by high-power microwave",

abstract = "The generation of overdense plasma using an electron cycltron resonance (ECR) technique in a rectangular waveguide by high power microwave, was discussed. The plasma density about 1012 cm-3 and electron temperature 8 - 12 eV were observed using a Langmuir probe. It was shown that these parameters can be cntrolled by adjusting the magnetic fields, gas pressure and/or microwave power. This plasma can be used in plasma processing and for the plasma-based particle accelerator.",

author = "Mishra, {Lekha Nath} and Kanetoshi Shibata and Hiroaki Ito and Noboru Yugami and Yasushi Nishida",

year = "2004",

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AU - Mishra, Lekha Nath

AU - Shibata, Kanetoshi

AU - Ito, Hiroaki

AU - Yugami, Noboru

AU - Nishida, Yasushi

PY - 2004/1

Y1 - 2004/1

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AB - The generation of overdense plasma using an electron cycltron resonance (ECR) technique in a rectangular waveguide by high power microwave, was discussed. The plasma density about 1012 cm-3 and electron temperature 8 - 12 eV were observed using a Langmuir probe. It was shown that these parameters can be cntrolled by adjusting the magnetic fields, gas pressure and/or microwave power. This plasma can be used in plasma processing and for the plasma-based particle accelerator.

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M3 - 学術論文

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Characteristics of electron cyclotron resonance plasma generated in a rectangular waveguide by high-power microwave

Abstract

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