A Novel Technique of Fabricating Nitride/Oxide Nanocomposite Coatings - Using Differential Pumping Co-sputtering System-

Masateru Nose, Wen-An Chiou, TokimasaKawabata, Yuji Hatano, Kenji Matsuda

Research output: Contribution to conference › Presentation

Original language	Japanese
State	Published - 2012
Externally published	Yes
Event	3th International Conference on Plasma Surface Engineering (PSE2012) - Duration: 2012/01/01 → …

Conference	3th International Conference on Plasma Surface Engineering (PSE2012)
Period	2012/01/01 → …

Cite this

@conference{bad353888df04df2807ecbf2c2918c82,

title = "A Novel Technique of Fabricating Nitride/Oxide Nanocomposite Coatings - Using Differential Pumping Co-sputtering System-",

author = "Masateru Nose and Wen-An Chiou and TokimasaKawabata and Yuji Hatano and Kenji Matsuda",

year = "2012",

language = "日本",

note = "3th International Conference on Plasma Surface Engineering (PSE2012) ; Conference date: 01-01-2012",

}

TY - CONF

T1 - A Novel Technique of Fabricating Nitride/Oxide Nanocomposite Coatings - Using Differential Pumping Co-sputtering System-

AU - Nose, Masateru

AU - Chiou, Wen-An

AU - TokimasaKawabata,

AU - Hatano, Yuji

AU - Matsuda, Kenji

PY - 2012

Y1 - 2012

M3 - 学会発表

T2 - 3th International Conference on Plasma Surface Engineering (PSE2012)

Y2 - 1 January 2012

ER -