Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 2012/04/01 → 2015/03/31 |
Verification of ion implantation method using intense pulsed heavy ion beam for next generation semiconductor
- Ito, Hiroaki (PI)
| Status | Finished |
|---|---|
| Effective start/end date | 2012/04/01 → 2015/03/31 |