Microstructure and properties of AlN/SiOx nanocomposite films prepared by diffe-rential pumping co-sputtering system

Activity: Talk or presentation › Oral presentation

Period2012/09/10 → 2012/09/13
Event title9th Polish-Japanese Joint Seminar on Micro and Nano Analysis, 10-13 September 2012 Sieniawa, Poland
Event typeOther